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13th Seminar on Quantitative Microscopy (QM)
9th Seminar on Nanoscale
Calibration, Standards and Methods

Dimensional and related measurements in the micro- and nanometre range

October 10th to 12th, 2023 in Helsinki/Espoo, Finland

Information on the venue, travel details and registration fees will be given soon.

  • Registration will open in March 2023

  • Submission of abstracts (about 2 pages) via webinterface will be open March to June 2023

  • Review of abstracts by Scientific Committee in July 2023

  • Notification of acceptance as poster or oral presentation in August 2023


This year’s Nanoscale will include Special Sessions on high-speed SPM measurements of functional properties of nanostructures and 3D roughness & dimensional measurements by optical 3D microscopy (EMPIR projects 20IND08 MetExSPM and 20IND07 TracOptic). Lab tours to the metrology labs on VTT’s Otaniemi campus in Espoo will be offered to the participants, too. Selected papers will be peer-reviewed for publication in Measurement Science and Technology (MST).


The seminar will be organized by

Technical Committee Length (TC-L)
Project 1342

National Metrology Institute VTT MIKES
Teknologian tutkimuskeskus VTT Oy
VTT Technical Research Centre of Finland Ltd
Physikalisch-Technische Bundeanstalt (PTB)
National Metrology Institute of Germany


The seminar will be supported by

BIPM Consultative Committee Length

Working Group Nanometrology (CCL-WG-N)