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13th Seminar on Quantitative Microscopy (QM)
9th Seminar on Nanoscale
Calibration, Standards and Methods

Dimensional and related measurements in the micro- and nanometre range

October 10th to 12th, 2023 in Helsinki, Finland

The white cathedral of Helsinki Senate Square  Evening view to Market Square from the sea


NanoScale 2023 will take place in the conference centre Technopolis Ruoholahti (location map) in the West of the centre of Helsinki, just 2 km from the heart of the town (i. e. from Market Square, Cathedral, Esplanades...). We plan to meet in person (virtual participation is currently not planned).

  • for participants from Braunschweig: Train traffic is heavily disturbed all around Braunschweig October 6th-13th due to construction, etc. - partly at short notice. Please keep checking DB App and start several hours earlier not to miss your flight to Helsinki.

  • 105 participants from 24 countries on all continents have registered for NanoScale in Helsinki.
    Registration is closed now. Please check if the fee has been paid by bank transfer in order to avoid any troubles and delays at Check-In. Remember that registration and payment on the site is not possible.

  • A total of 83 presentations will be given - Many thanks to all authors!
    31 oral presentations, 52 posters (see program at a glance - pdf)

  • As by far more abstracts for oral presentation had been submitted until the deadline July 12th than timeslots available, the Scientific Committee reviewed all abstracts for talks based on a scoring system to decide whether these papers are accepted as a talk or as a poster.

  • All corresponding authors have been notified of acceptance as talk or poster by e-mail by September 1st.
    If you are a corresponding author and have not received such a mail, please contact the organizers immediately!

  • At Tuesday noon, there will be a bus shuttle service from the TracOptic M27 Meeting in Espoo to NanoScale in Helsinki, as well as at Thursday noon for the NanoScale participants from Technopolis Ruoholahti to Espoo for the VTT lab tours. Please see Program for details.

  • Lab visits: We plan to arrange lab tours for NanoScale participants on Thursday afternoon. Further lab tours will be organized in conjunction with the other meetings of the Length Metrology Week on other days. Please note: All guests need to present an ID card / passport upon entry to the VTT Mikes campus!


This year’s Nanoscale will include Special Sessions on "High-speed SPM measurements of functional properties of nanostructures" and "3D roughness & dimensional measurements using optical 3D microsopy and optical distance sensors" (EMPIR projects 20IND08 MetExSPM and 20IND07 TracOptic). Lab tours to the metrology labs of VTT MIKES on the Otaniemi campus in Espoo will be offered to the participants, too.

All submissions will be included in the Booklet of Abstracts that will be handed out to the participants upon check-in.

NanoScale intends to offer peer-reviewed publication of full papers in a (virtual) Special Issue of Measurement Science and Technology (MST). As so-called Transformative and Institutional Open Access Agreements have been concluded recently, most authors can publish in MST on an open access basis at no cost to themselves. Please wait with your MST submission until details for this Special Issue submission will be given; the deadline for submission will be a few weeks after the conference, to allow authors more time for the drafting of their manuscripts. Once published, all NanoScale participants will be granted free access to all papers (incl. those that are not open access) of this Special Issue for a given time.


The seminar will be organized by

Technical Committee Length (TC-L)
Project 1342

National Metrology Institute VTT MIKES
Teknologian tutkimuskeskus VTT Oy
VTT Technical Research Centre of Finland Ltd
Physikalisch-Technische Bundeanstalt (PTB)
National Metrology Institute of Germany


The seminar will be supported by

BIPM Consultative Committee Length
Working Group Nanometrology (CCL-WG-N)
Helmholtz Fund
Promoting progress in metrology


Special Sessions

EMPIR-Project 20IND07 TracOptic
Traceable industrial 3D roughness and dimensional measurement using optical 3D microsopy and optical distance sensors
EMPIR-Project 20IND08 MetExSPM
Traceability of localised functional properties of nanostructures with high speed scanning probe microscopy
Both 20IND07 TracOptic and 20IND08 MetExSPM are Joint Research Projects within the European Metrology Research Programme EMPIR