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13th Seminar on Quantitative Microscopy (QM)
9th Seminar on Nanoscale
Calibration, Standards and Methods

Dimensional and related measurements in the micro- and nanometre range

October 10th to 12th, 2023 in Helsinki, Finland

The white cathedral of Helsinki Senate Square  Evening view to Market Square from the sea


NanoScale 2023 took place in the conference centre Technopolis Ruoholahti (location map) in the West of the centre of Helsinki, just 2 km from the heart of the town (i. e. from Market Square, Cathedral, Esplanades...) from October 10th to 12th, 2023. After a break of 4 years due to the Covid-19 pandemic, it was generally appreciated that the conference was fully in person (with one hybrid session as open stakeholder meeting).

  • Deadline for MST submission was February 29th, 2024. Most manuscripts are currently under review, but the first papers have already completed the review and are listed and linked on the landing page of the NanoScale MST special section Further papers will be added by and by once their review will be completed.

  • The next NanoScale is scheduled for Sep./Oct. 2026.

  • 106 participants from 24 countries on all continents took part at NanoScale in Helsinki.
    This is about as many as in the record-year 2019!
    Warm thanks to all participants for their inspiring scientific exchange and so many good conversations!

  • A total of 83 presentations were given - Many thanks to all authors!
    31 oral presentations, 52 posters (see program at a glance - pdf)

  • As by far more abstracts for oral presentation had been submitted, the Scientific Committee reviewed all abstracts for talks based on a scoring system to decide whether these papers are accepted as a talk or as a poster.

  • In addition to the scientific talks and posters, an excursion to the VTT MIKES labs was organized on Thursday afternoon. Please see Program for details. Further lab tours were offered in conjunction with the other meetings of the Length Metrology Week on other days. We thank our colleagues at VTT MIKES for hosting so many groups of guests in their labs.

Publication of peer-reviewed papers in Measurement Science and Technology (MST)!

How to submit

NanoScale offers peer-reviewed publication of full papers in a (virtual) Special Issue of Measurement Science and Technology (MST) to all authors of NanoScale 2023. As so-called Transformative and Institutional Open Access Agreements have been concluded recently, most authors can publish in MST on an open access basis at no cost to themselves. Please write your manuscript according to the rules applicable for MST, submit it via the special issue MST landing page or directly on the MST submission interface and select “NanoScale 2023” from the drop-down menu at the bottom of step 1

Deadline for submission: originally set to mid-December 2023, but then extended to February 29th, 2024. Manuscripts submitted later face the risk of time-out if the review process cannot be finished timely.
Most manuscripts are currently in the review process. After successful completion of the review, papers will be listed one by one and linked on the landing page of the(virtual) special issue.
Please allow a few months until all accepted papers will appear there (summer/autumn 2024).
Once publication is complete, all NanoScale participants will be granted free access to all papers (incl. those that are not open access) of this Special Issue for a given time.


Special Sessions and Labtours

NanoScale 2023 included Special Sessions on "High-speed SPM measurements of functional properties of nanostructures" and "3D roughness & dimensional measurements using optical 3D microsopy and optical distance sensors" (EMPIR projects 20IND08 MetExSPM and 20IND07 TracOptic). Lab tours to the metrology labs of VTT MIKES on the Otaniemi campus in Espoo were offered to the participants, too.


The Book ob Abstracts

All submissions are included in the Book of Abstracts that was handed out to the participants upon check-in and made available to them for download as pdf-file.

The seminar was organized by

Technical Committee Length (TC-L)
Project 1342

National Metrology Institute VTT MIKES
Teknologian tutkimuskeskus VTT Oy
VTT Technical Research Centre of Finland Ltd
Physikalisch-Technische Bundeanstalt (PTB)
National Metrology Institute of Germany


The seminar was supported by

BIPM Consultative Committee Length
Working Group Nanometrology (CCL-WG-N)
Helmholtz Fund
Promoting progress in metrology


Special Sessions

EMPIR-Project 20IND07 TracOptic
Traceable industrial 3D roughness and dimensional measurement using optical 3D microsopy and optical distance sensors
EMPIR-Project 20IND08 MetExSPM
Traceability of localised functional properties of nanostructures with high speed scanning probe microscopy
Both 20IND07 TracOptic and 20IND08 MetExSPM are Joint Research Projects within the European Metrology Research Programme EMPIR