Scope of the seminar


For precise dimensional measurements the use of high resolution instruments is necessary to resolve tiny micro- and even nanostructures and to determine their dimensional and other properties. Today - and especially in the case of nanotechnology products - such small surface structures can dominate its functional properties completely and are decisive for the envisaged function of the workpiece. The quantitative determination of such properties is essential not only in research and development, but is increasingly a prerequisite in quality assurance, process control and failure analysis in industry.

Apart from reliable and stable instruments, quantitative measurements presuppose suitable measurement procedures as well as calibration artefacts and methods. Therefore instruments need to be characterized and calibrated by suitable measurement standards following generally agreed and accepted uniform procedures as specified, e.g. in documentary standards, and finally measurement uncertainty budgets need to be set up to achieve traceable results and ensure comparability. 

The NanoScale seminar will stimulate the exchange of information between metrologists, users in science and industry and manufacturers of relevant hardware, i.e. optical, electron and scanning probe techniques, and software.

Topics to be addressed

Instrumentation and methods

  • High-resolution optical microscopy (phase-shift, confocal, white-light, holographic, ...),
  • Atomic force microscopy (AFM) (contact, non-contact, intermittent, …)
  • Other scanning probe microscopy  (SPM) techniques, e.g. Kelvin probe microscopy
  • High-resolution, high-speed, low force tactile instruments
  • Scanning electron microscopy (SEM, TSEM, TEM, STEM)
  • Other instruments for dimensional surface metrology or surface analytics at the micro- and nanoscale.

Advances in instrumentation such as repeatable probe/sample positioning, high-speed, low force, position-measuring systems, novel/improved probe/detector systems, novel 3D probing concepts, linearization methods, image processing, probe-sample interaction as well as modelling and simulation techniques.

Calibration & correction methods

Instruments need to be calibrated to achieve accurate, traceable measurements. Calibration and correction methods and procedures, standards, traceable measurements (dimension, force, mechanical, ...), uncertainty analysis and budgets as well as key and supplementary international comparisons.


Quantitative measurements and measurement applications in fields like micro or nano-objects, line width, surface roughness, micro systems technology, micro-electronics, nano/quantum/molecular electronics, tribology, surface chemical analysis, biology and medicine.