Scope

The quantitative determination of the properties of micro- and nano structures is essential in research and devellopment and is a prerequisite in process control and quality assurance in industry. The knowledge of the geometrical dimensions of structures in most cases is the base, to which other physical and chemical properties are linked. Quantitative measurements presuppose reliable and stable instruments, suitable measurement procedures as well as suitable calibration artefacts and methods.

The seminar will stimulate the exchange of information between users in science and industry and manufacturers of relevant hard- and software.

Topics to be addressed

Instrumentation and methods

Novel/improved instruments and methods, repeatable probe/sample positioning, position-measuring systems, novel/improved probe/detector sysrems, linearization methods, image processing

Calibration & correction methods

Calibration methods, calibration standards, calibration procedures, traceable measurements, standardization, uncerntainty of measurements

Applications

Quantitative measurements and measuremtn problems in: micro electronics, micro systems technology, nano/quantum/molecular electronics, chemistry, biology, medicine, environmental technology, surface science, materials science, surface processing